The equipment manufacturers behind the process.

World-leading single-wafer and batch ALD for logic, memory, and power devices. Pulsar® ALD and EAGLE® XP8 systems.

Centura® ALD platform for HVM gate dielectrics, barriers, and metal fills in leading-edge logic and memory.

ALTUS® ALD for W and Co metal fill in advanced DRAM and logic contacts; also VECTOR® thermal ALD.

Trias® and Prominence® ALD systems for 200/300 mm HVM gate dielectrics and metal barriers.

Industrial spatial ALD and batch TFS-series systems for R&D to high-volume coating production.

P-series and SUNALE™ batch ALD for industrial coating, semiconductor, and advanced packaging.

FlexAL® and OpAL® plasma-ALD systems for university research and advanced materials development.

Fiji® and Gemini® ALD/PEALD systems; spatial ALD for compound semiconductor and LED markets.

Eureka® large-area ALD systems for flat panel display and semiconductor applications.

GemStar™ and Fiji™ research ALD and PEALD systems for university and government labs.

SI ALD Pro plasma-enhanced ALD with integrated ellipsometry; thin-film measurement and deposition.

Ultra-fast spatial ALD encapsulation for OLED barrier and flexible electronics roll-to-roll.

High-throughput particle and powder ALD systems for battery, catalyst, and advanced materials.

nanoPVD and nanoALD benchtop systems for flexible laboratory research deposition.

ALD-150LE and ALD-150LX research ALD systems; vacuum components and custom deposition hardware.

Roll-to-roll ALD barrier systems for flexible electronics and polymer substrate coating.

Custom MBE and ALD research systems for compound semiconductor and III-V material R&D.

Specialty steam and ozone delivery systems for ALD co-reactant generation.

Lucida™ series batch and single-wafer ALD systems for Korean memory and logic fabs.

Spatial and batch ALD systems for display and semiconductor customers in Korea and Asia.

ALD process equipment and substrate holders for Taiwan semiconductor and display manufacturers.

Leading Chinese ALD equipment manufacturer for domestic logic, memory, and power semiconductor fabs.

Chinese ALD and etch systems targeting domestic semiconductor self-sufficiency.

Dry strip and thermal ALD systems for Chinese logic and memory device manufacturers.